REXROTH|0608820069|Analog Remote Unit

【Key Characteristics】

• Manufacturer: ZYGO Corporation (Ametek)

• Function: High-resolution laser interferometry measurement and displacement tracking.

• Type: VME-bus Measurement Board / ZMI Controller.

• Features: Sub-nanometer resolution, multi-axis synchronization, and high-speed data sampling.

• Availability: Genuine ZYGO Stock available for immediate global express shipping.

【Product Overview】

The ZYGO 8010-0105-02 (ZMI-501) is a cornerstone of ultra-precision motion control systems. Engineered for the most demanding semiconductor lithography and metrology applications, this ZMI-501 measurement board decodes laser interference signals into precise position data with sub-nanometer accuracy. As a specialized global supplier of high-end metrology components, we understand that a ZYGO failure can halt an entire production line. We provide verified 8010-0105-02 modules to ensure your nanopositioning stages maintain peak performance and absolute accuracy. 

【ZYGO ZMI Series Selection & Comparison Guide】

Since the model numbers of ZYGO are very similar, but the functional revisions are different, please refer to the following inventory comparison:

【Industry Application】

• Semiconductor Lithography: Controlling the ultra-precise movement of the wafer stage and reticle stage in DUV/EUV scanners.

• High-End Metrology Tools: Integrated into Scanning Electron Microscopes (SEM) and Atomic Force Microscopes (AFM) for nanometer-level position feedback.

• Precision CNC & Diamond Turning: Feedback systems for ultra-precision lathes used in making high-end optical lenses.

• Flat Panel Display (FPD) Inspection: Accurate positioning for large-scale glass substrate inspection systems.

【FAQ】

Q: What is the difference between the -01 and -02 versions of the 8010-0105?

A: In ZYGO metrology, the suffix (-02) usually represents a hardware revision or firmware update that improves signal-to-noise ratios or processing speed. While often backward compatible, we suggest checking your system software version.

Q: What does "ZMI" mean, and can I use a non-ZMI board for my system?

A: ZMI stands for ZYGO Measurement Interface. It is the proprietary high-resolution hardware protocol developed by ZYGO for laser interferometry.

• ZMI Boards (e.g., ZMI-501 / 8010-0105-02): These are specialized processing cards that decode laser interference signals into actual position data. They are built for VMEbus architecture and offer sub-nanometer resolution.

• Non-ZMI Boards: These are typically generic industrial I/O or communication cards. They cannot process ZYGO laser signals.

• The Difference: If your system uses a ZYGO laser head (like the 7702), it must have a ZMI-branded interface board to function. A non-ZMI board will not have the necessary high-speed optical signal processing chipsets required for displacement measurement.

ZYGO  8010-0105-02 ZMI-501  

Core System Specifications:

Logistics&Shipping Info(For Buyer):

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